MSA6000D

MSA6000D MEMS Accelerometer

  1. Based on MEMS Process
  2. SPI Interface
  3. ±2〜±200g Range
  4. Low Noise
  5. Excellent Long-term Stability
  6. Harsh Environment
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Description

MSA6000D MEMS Accelerometers – MEMS Inertial Devices and Systems

  • Based on MEMS Process
  • SPI Interface
  • ±2〜±200g Range
  • Low Noise
  • Excellent Long-term Stability
  • Harsh Environment

 

Applications

  • Integrated Navigation Systems & Inertial Guidance Systems
  • Flight Control & Guidance Systems
  • Attitude Heading Reference Systems (AHRS)
  • Stabilization of Antennas, Cameras & Platforms

 

Parameter Unit MSA6000D-02 -10 -15 -30 -50 -100 -150 -200
Range g ±2 ±10 ±15 ±30 ±50 ±100 ±150 ±200
Bias mg ±10 ±50 ±50 ±100 ±100 ±200 ±300 ±300
Bias Stability mg ≤0.1 ≤0.5 ≤0.5 ≤1 ≤2 ≤5 ≤7.5 ≤10
Bias Repeatability mg ≤0.1 ≤0.5 ≤0.5 ≤1 ≤2 ≤5 ≤7.5 ≤10
Bias Temp. Coefficient mg/°C ≤0.1 ≤0.5 ≤0.6 ≤1.2 ≤2.5 ≤5.0 ≤7.5 ≤10
Scale Factor Stability ppm ≤300 ≤300 ≤300 ≤300 ≤300 ≤500 ≤500 ≤500
Scale Factor Repeatability ppm ≤300 ≤300 ≤300 ≤300 ≤300 ≤500 ≤500 ≤500
Scale Factor Temp. Coefficient ppm/°C ≤50 ≤50 ≤100 ≤150 ≤150 ≤200 ≤200 ≤200
Resolution mg 0.05 0.3 0.5 1.0 2.5 5.0 7.5 10
Bandwidth Hz 125 125 125 125 125 125 125 125
Sensitive Axis Misalignment mrad <10 <10 <10 <10 <10 <10 <10 <10
% <1 <1 <1 <1 <1 <1 <1 <1
Non-linearity %FS Max ≤0.05 ≤0.05 ≤0.05 ≤0.05 ≤0.1 ≤0.3 ≤0.3 ≤0.5
Resonant Frequency kHz 1.3 2.7 3.8 4.5 5.8 8.1 10.1 11.4
Start-up Time s 1 1 1 1 1 1 1 1
Excitation Vdc 4.9 ~ 5.1
Current(@5V) mA 25
Size mm 11.43 x 11.43 x 3.8
Packaging Ceramic LCC28
Interface SPI
Operating Temp. °C

-40°C~+85°C(default);

-55°C~+125°C (as request)
Storage Temp. °C -55~+125°C
Shock Resistance g 20,000g
All values are typical at +25°C, +5Vdc unless otherwise statement.

 

Structure (unit: mm)

MSA6000D structures - MSA6000D MEMS Accelerometer