Description
MSV3000 Variable Capacitance, Triaxial Accelerometers – MEMS Test and Measurement Sensors
Applications
- Aviation & Aerospace
- Helicopter & Aircraft Testing
- Automotive Testing & Crash Testing
- Civil Engineering Structural Testing
- Railway Technology
- Industrial Testing
Parameter | Unit | MSV3000-02 | -10 | -30 | -50 | -100 | -200 | -500 | -1000 | -10000 | -20000 |
Range | g | ±2 | ±10 | ±30 | ±50 | ±100 | ±200 | ±500 | ±1000 | ±10000 | ±20000 |
Frequency Response ±5% | Hz | 0~250 | 0~1000 | 0~1000 | 0~1000 | 0~1500 | 0~1500 | 0~2500 | 0~2500 | 0~5000 | 0~5000 |
Damping Coefficient | 0.7 | 0.7 | 0.7 | 0.7 | 1 | 1 | 1 | 1 | 1 | 1 | |
Sensitivity(@100Hz) | mV/g | 1000±8 | 200±2 | 66.6±1 | 40±1 | 20±1 | 10±1 | 4±0.3 | 2±0.3 | 0.2±0.03 | 0.1±0.03 |
Resonant Frequency | kHz | 1.3 | 2.7 | 5.5 | 5.5 | 9.8 | 9.8 | 12.7 | 12.7 | 12.7 | 12.7 |
Transverse Sensitivity, Typ. Max | % | 1.0 | 1.0 | 1.0 | 1.0 | 2.0 | 2.0 | 2.0 | 2.0 | 3.0 | 3.0 |
Sensitive Axis Misalignment, Typ. Max | mrad | 10 | 10 | 10 | 10 | 10 | 10 | 10 | 10 | 10 | 10 |
Non-linearity | % FSO | <0.5 | <0.5 | <0.5 | <0.5 | <0.5 | <0.5 | <1 | <1 | <4 | <6 |
Phase Shift (Max@100Hz) | Degrees | 20 | 10 | 10 | 10 | 10 | 10 | 10 | 10 | 5 | 5 |
Noise Density | mgrms/√Hz | 0.0002 | 0.001 | 0.005 | 0.01 | 0.5 | 0.75 | 1.5 | 2 | 20 | 40 |
Resolution | mg | 0.002 | 0.01 | 0.05 | 0.1 | 5 | 7.5 | 15 | 20 | 200 | 400 |
Sensitivity Temp. Coefficient | ppm/°C | 50 | 50 | 50 | 50 | 50 | 50 | 50 | 50 | 50 | 50 |
Bias Temp. Coefficient | mg/°C | 0.05 | 0.5 | 1.5 | 2.5 | 5.0 | 10 | 25 | 50 | 500 | 1000 |
0g Output | mV | 2500±10 | |||||||||
Capacitive Load Drive | μF | 0.05 | |||||||||
Resistance Load Drive | kΩ | <10 | |||||||||
Output Impedance | Ω | >10 | |||||||||
Supply Current | mA | <16 | |||||||||
Excitation | Vdc | 8~40 | |||||||||
Error Proofing Design | Yes | ||||||||||
Shock (half-sine,200 μsec) | g | 20000 | |||||||||
Random Vibration(20~2000Hz) | grms | 20 | |||||||||
Storage Temp. | °C |
-40°C ~+85°C (default); -55°C ~+125°C (as request) |
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Operating Temp. | °C | -55~+125 | |||||||||
Housing Material | Material | Titanium Alloy / Stainless Steel | |||||||||
Size | mm | 22 x 22 x 22.5 | |||||||||
Connector | Type | Miniature 9-pin hermetic-male(pins) | |||||||||
Mounting Thread | Holes for M3 Mounting Screws / Adhesive | ||||||||||
Packaging | Hermetic | ||||||||||
Ground Isolated | Yes | ||||||||||
Weight | grams | 34 (Titanium Alloy) / 55(Stainless Steel) | |||||||||
All values are typical at +25°C, 100Hz, +15Vdc unless otherwise statement Calibration data, traceable to the National Institute of Metrology (NIM) is supplied. |
Structure (unit: mm)
1 | 2 | 3 | 4 | 5 | 6 | 7 | 8 | 9 |
1 | GND | GND | OUTZ | +15V | – | – | OUTY | OUTX |