Description
MSV6000 Variable Capacitance Accelerometers – MEMS Test and Measurement Sensors
Applications
- Aviation & Aerospace
- Helicopter & Aircraft Testing
- Automotive Testing & Crash Testing
- Civil Engineering Structures
- Railway Technology
- Industrial Testing
| Parameter | Unit | MSV6000-02 | -10 | -30 | -50 | -100 | -200 | -500 | -1000 | -10000 | -20000 |
| Range | g | ±2 | ±10 | ±30 | ±50 | ±100 | ±200 | ±500 | ±1000 | ±10000 | ±20000 |
| Bandwidth (±5%) | Hz | 0-250 | 0-1000 | 0-1000 | 0-1000 | 0-1500 | 0-1500 | 0-2500 | 0-2500 | 0-5000 | 0-5000 |
| Resonant Frequency | kHz | 1.3 | 2.7 | 5.5 | 5.5 | 9.8 | 9.8 | 18.0 | 25.8 | 50.0 | 50.0 |
| Noise Density | μV/√Hz | 10 | 10 | 10 | 10 | 10 | 10 | 10 | 10 | 10 | 10 |
| Bias | mg | <10 | <50 | <150 | <250 | <500 | <1000 | <2500 | <5000 | <50000 | <100000 |
| Bias Stability | mg | <0.1 | <0.5 | <1.5 | <2.5 | <5.0 | <10 | <25 | <50 | <500 | <1000 |
| Bias Repeatability | mg | <0.1 | <0.5 | <1.5 | <2.5 | <5.0 | <10 | <25 | <50 | <500 | <1000 |
| Bias Temp. Coefficient | mg/°C | <0.2 | <0.8 | <2.0 | <3.0 | <5.0 | <10 | <25 | <50 | <500 | <1000 |
| Sensitivity | mV/g | 1000±8 | 200±2 | 66.6±1 | 40±1 | 20±1 | 10±1 | 4±0.3 | 2±0.3 | 0.2±0.03 | 0.1±0.01 |
| 1-year Sensitivity Stability | ppm | 300 | 300 | 300 | 300 | 300 | 300 | 1500 | 3000 | 5000 | 5000 |
| Sensitivity Temp. Coefficient | ppm/°C | 100 | 100 | 100 | 100 | 100 | 100 | 100 | 100 | 100 | 100 |
| Transverse Sensitivity | mrad Max | <10 | <10 | <10 | <10 | <10 | <10 | <10 | <10 | <10 | <10 |
| % Max | <1 | <1 | <1 | <1 | <1 | <1 | <1 | <1 | <1 | <1 | |
| Resolution/Threshold (@1 Hz) | mg | 0.002 | 0.01 | 0.05 | 0.1 | 5 | 7.5 | 15 | 20 | 200 | 400 |
| Non-linearity | % of FS | <0.5 | <0.5 | <0.5 | <0.5 | <0.5 | <0.5 | <1 | <1 | <4 | <6 |
| Operating Temp. |
-40°C~+85°C (default); -55°C ~+125°C (as request) |
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| Shock | Up to 20,000g(0.15ms half-sine, 3 time shocks in each direction) | ||||||||||
| Recovery Time | <1ms (1000g, 1ms half-sine shock) | ||||||||||
| Vibration | 20g rms, 20~2000Hz (random noise, 30 minutes in each direction) | ||||||||||
| Packaging | Hermetic | ||||||||||
| ESD Sensitivity | Class 2(requirements MIL-STD-833-G, 1 Method 3015.7), HBM 2kV | ||||||||||
| Supply Voltage | 3.0-7.0Vdc. (Typ. 5.0Vdc) | ||||||||||
| Output Range | 0.5~4.5Vdc@5.0Vdc Supply Voltage (2.5V±10mV@0g) | ||||||||||
| Supply Current | <6mA @5.0Vdc | ||||||||||
| Output Impedance/Load Drive | Max 50pF, Min 10KΩ | ||||||||||
| Weight | <1 gram | ||||||||||
| Size | Typ. 9.0 x 9.0 x 2.6mm (0.35×0.35×0.101 inch) | ||||||||||
| All values are typical at +25°C, +5Vdc unless otherwise statement. | |||||||||||
Structure (unit: mm)
